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2003 Southwest Test Workshop
(Each presentation is in Adobe
Acrobat format)
TABLE OF CONTENTS
Cost of Test Tutorial
Dinner Guest Speaker
Opening Session - Chairman's Welcome
Session 1 - New Probe Technologies
Session 2 - Memory Probing
Session 3 - Vertical Probe Challenges
Session 4 - Metal Stack / Dielectric Characterization
Session 5 - MEMs Technologies
Session 6 - Controlling Contact Resistance
Session 7 - Probe Process Characterization
Session 8 - Advances in Probe Card Analyzers
COST OF TEST
TUTORIAL
Top | Session
1 | Session 2 | Session 3
| Session 4 | Session 5 |
Session 6 | Session 7 | Session 8
"The
Impact of Design For Test on the Cost of Test"
DINNER SPEAKER
Top | Session
1 | Session 2 | Session 3
| Session 4 | Session 5 |
Session 6 | Session 7 | Session 8
"The
IC Market Recovery Outlook"
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Vice President
IC Insights, Inc.
Scottsdale, AZ
480-348-1133 |
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CHAIRAMN'S WELCOME
Top | Session
1 | Session 2 | Session 3
| Session 4 | Session 5 |
Session 6 | Session 7 | Session 8
Winner - Lifetime Achievement Award
"Welcome to
SWTW-2003"
Session 1 - NEW PROBE TECHNOLOGIES
Top | Session 1
| Session 2 | Session 3 |
Session 4 | Session 5 |
Session 6 | Session 7 | Session 8
"Full
Wafer Contact Repeatability and Reliability"
"A
High Parallelism, High Bandwidth Probe Card using SiFi MEMS Probes"
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Bob Aldaz
Yu Zhou, Ph.D.
David Yu, Ph.D.
Gert Hohenwarter
Tassos Golnas
Advantest America, Inc.
Buffalo Grove, IL
847-821-3204 |
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"Vertical
Micro-Probe Design Based on the EFABTM Micro-Fabrication Process"
Session 2 - MEMORY PROBING
Top | Session 1
| Session 2 | Session 3 |
Session 4 | Session 5 |
Session 6 | Session 7 | Session 8
"High
Throughput Challenges for 300mm Wafer Testing"
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Powerchip Semiconductor Corp
NO 12 LI-HSIN RD.I , SBIP
HsinChu, Taiwan,300
886-3-5792131
clarkl@psc.com.tw
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FormFactor, Inc., Asia
Re-Ju Oh-imachi Bldg. 7F
4-13-17, Oh-i, Shinagawa-ku
Tokyo 140-0014
81-3-5746-3100
nkawamata@formfactor.com |
Tokyo Electron Limited
2381-1 Kitagejo Fujii-cho, Nirasaki City
Yamanashi
407-8511 Japan
81-551-23-2148
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"Critical
Factors in Testing MRAM Devices"
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Cypress Semiconductor
3901 North First Street
San Jose, CA 95134-1599
408-456-1926
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Chris Taylor
Electroglas Inc.
6024 Silver Creek Valley Rd
San Jose, CA 95138
408-528-3325 |
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"Memory
XXL Another Step on the Way to Full Wafer Probing - 256 DUT on Beta-mode"
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Gunther Boehm
FEINMETALL GMBH
Zeppelinstraße 8
D- 71083 Herrenberg
0 70 32 / 20 10 - 0
info@feinmetall.de |
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Session 3 - VERTICAL PROBE CHALLENGES
Top | Session 1
| Session 2 | Session 3 |
Session 4 | Session 5 |
Session 6 | Session 7 | Session 8
"International
SEMATECH Wafer Probe Council Report on Vertical Probing Experiences"
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IBM Microelectronics
Zip 5E1
2070 Route 52
Hopewell Junction, NY 12533
845-894-2348
taber@us.ibm.com |
Infineon Technologies
Room 02/352
St Martin Straße 76
D-81541 Munich, Germany
49-89-234-28290
gavin.gibson@infineon.com |
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"Hybrid
Buckling Beam Contact for Vertical Probe Cards"
"Ultimate
Frequency Limitations of Cobra Probe Contactors"
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IBM T.J. Watson Research Center
Building 801 Rt 134
MS 13-257
Yorktown Heights, NY 10598
914-945-3620
tazzi@us.ibm.com |
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Winner - Best Presentation,
Tutorial in Nature
"Predicting
the Performance of Sort Tooling to 40 Gb/s"
Session 4 - METAL STACK / DIELECTRIC CHARACTERIZATION
Top | Session 1
| Session 2 | Session 3 |
Session 4 | Session 5 |
Session 6 | Session 7 | Session 8
"Multi-site
Probing for Wafer-Level Reliability"
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Agilent Technologies
5301 Stevens Creek Blvd
M/S 54L-WY
Santa Clara, CA
95051
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David Pachura
LSI LOGIC
1621 Barber Ln
MS AD-222
Milpitas, CA 95035
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Winner - Best Technical
Presentation
"A
Novel In-situ Methodology to Characterize Bond Pad and Dielectric
Mechanical Behavior during Wafer Level Test"
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Texas Instruments, Inc.
13560 N. Central Expressway
Dallas, TX 75265 USA
Hartfield@ti.com
972-995-6007
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Tom Moore, Ph.D.
Omniprobe, Inc.
7738 Forest Lane, Ste. 426
Dallas, TX 75230
moore@omniprobe.com
972-840-8815
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Jerry Broz, Ph.D.
Point Technologies, Inc.
6859 N. Foothills Hwy
Boulder, CO 80302
jerry@pointtech.com
800-557-7059
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"Vertical
Probe Development for Copper Probing Challenges"
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Bahadir Tunaboylu, Ph.D.
Kulicke & Soffa Industries
1150 N. Fiesta Blvd.
Gilbert, AZ 85233
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Ethan Caughey
Intel Corp.
2200 Mission College Blvd
Santa Clara, CA 95054
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"MicroForce™
Probing for low-k ILD Testing"
Session 5 - MEMS TECHNOLOGIES
Top | Session 1
| Session 2 | Session 3 |
Session 4 | Session 5 |
Session 6 | Session 7 | Session 8
"MEMs
Technology in Testing"
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SCS Hightech Inc.
1F, No.40, Industry E. 4th rd.,
Science-Based Industrial Park
Hsin-Chu, Taiwan 300
Taiwan. R.O.C.
03-6662828 ext. 3201
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Winner - Best Data
Presentation
"The
New Probe Tip Fabricated by MEMS (LIGA Process) for No-cleaning Test"
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K.Okada
J.Yorita
Y.Hirata
Harima R&D Department
Sumitomo Electric Industries, LTD.
haga-tsuyoshi@sei.co.jp |
Analysis Technology Research Center
Osaka R&D Laboratories
Sumitomo Electric
Industries, LTD. |
"A
Comparison of Scrub Marks & Contact Resistance Between Cantilever Type and
New MEMS Type Probe Cards"
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Byung-Ho Jo, Ph.D.
Phicom Ltd.
153-801, 60-29, Gasan-dong
Kumchon-gu
Seoul Korea
02-3282-1900
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"Multi-die
Testing using Silicon Micro-Cantilever Probe Card"
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AMST Co., Ltd.
404-2, Woncheondong, Paldalgu
Suwon Kyonggido 442-823
+82-31-217-6168
dikim@amst.co.kr |
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Session 6 - CONTROLLING CONTACT RESISTANCE
Top | Session 1
| Session 2 | Session 3 |
Session 4 | Session 5 |
Session 6 | Session 7 | Session 8
"On
the Way to 30-um Pads - A New Generation of Kerf Cards"
"Controlling
Contact Resistance with Probe Tip Shape and Cleaning Recipe Optimization"
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Clint Churchill
Vail McBride
Kelly Burnside
AMI Semiconductor
2300 Buckskin Road
Pocatello, ID 83201
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Jerry Broz, Ph.D.
Point Technologies, Inc.
6859 N. Foothills Hwy
Boulder, CO 80302
jerry@pointtech.com
800-557-7059
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International Test Solutions
2479 Chardonnay Way
Livermore, CA 94550
geneh@inttest.net
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"Off-Line
Chemical Cleaning Technology for Removal of Solder Contaminant from Cobra®
Vertical Technology Probe Tips"
Session 7 - PROBE PROCESS CHARACTERIZATION
Top | Session
1 | Session 2 | Session 3
| Session 4 | Session 5 |
Session 6 | Session 7 | Session 8
"New
Tools for Probing Process Management"
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Electroglas
1749 SW Airport Avenue
Corvallis, OR 97333
USA
541.738.2233
ckiest@electroglas.com |
Applied Precision, LLC
1040 12th Avenue NW
Issaquah, WA 98027
425-657-1348
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"A
Computer-based Probing C.O.O. Model"
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Infineon Technologies AG
Munich, Germany |
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"A
Statistical Method for Eliminating False Counts Due to Debris, Using
Automated Visual Inspection for Probe Marks"
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Mike Clay
August Technology – Plano TX
4900 West 78th Street
952-820-0080
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Winner -
Most Inspirational Presentation
"44
Micron Pitch Probe Capabilities Assessment"
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Tony Angelo
S.S. Yan
Tu-Anh Tran
Stephen Lee
Matt Ruston
Motorola - Chandler
Chandler, AZ |
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Session 8 - ADVANCES IN PROBE CARD ANALYZERS
Top | Session
1 | Session 2 | Session 3
| Session 4 | Session 5 |
Session 6 | Session 7 | Session 8
"Test and Maintenance of Very
High Pin Count Cards"
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Daniel Kosecki
Integrated Technology Corporation
1228 N. Stadem Drive
Tempe, Arizona 85281 USA
480-968-3459 X363
rod@inttechcorp.com
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"Performance
of a Next Generation High Speed, High Precision, Probe Card Analyzer"
"Future
Trends in Wafer Level Test"
SWTW 2003 Chairs:William Mann, General Chair Jerry Broz,
Ph.D., Point Technologies, Technical Program
Chair Maddie Harwood, CEM Inc., Registration and Finance Chair
SWTW 2003 Program Committee:
Michael Egloff, AMD Tom Foerster, Jazz Semiconductor
Gavin Gibson, Infineon Technologies Michael Harris, Texas Instruments Ken Karklin, Agilent Technologies Ger Koch, Philips Semiconductor Rey Rincon, Kulicke and Soffa
Phil Seitzer, Agere Systems
Roger Sinsheimer, Xandex
Tim Swettlen, Intel
Fred Taber, IBM Microelectronics
Bill Williams, Motorola
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